Journal article
Effect of ion implantation induced defects on optical attenuation in silicon waveguides
Authors
Knights AP; Hopper GF
Journal
Electronics Letters, Vol. 39, No. 23, pp. 1648–1649
Publisher
Institution of Engineering and Technology (IET)
Publication Date
November 13, 2003
DOI
10.1049/el:20031036
ISSN
0013-5194