Journal article
Femtosecond laser micromachining of grooves in silicon with 800 nm pulses
Abstract
Femtosecond laser micromachining of grooves in silicon is investigated using 150 fs pulses with a center wavelength of 800 nm. Ablation rates are investigated as a function of pulse energy, translation speed, and the number of consecutive passes. The effect of the laser polarization relative to the translation direction is observed, and the morphologies of the groove walls are examined. In addition, the uniformity of the groove depth is …
Authors
Crawford THR; Borowiec A; Haugen HK
Journal
Applied Physics A, Vol. 80, No. 8, pp. 1717–1724
Publisher
Springer Nature
Publication Date
May 2005
DOI
10.1007/s00339-004-2941-2
ISSN
0947-8396