Conference
Effect of laser drilling on surface and material properties of AlN ceramics
Authors
Nedialkov NN; Sawczak M; Jadraque M; Atanasov PA; Martin M; Sliwinski G
Volume
5958
Publisher
SPIE, the international society for optics and photonics
Publication Date
September 16, 2005
DOI
10.1117/12.622706
Name of conference
Lasers and Applications
Conference proceedings
Proceedings of SPIE--the International Society for Optical Engineering
ISSN
0277-786X