Journal article
NbN thin films reactively sputtered with a high‐field direct‐current magnetron
Authors
Deen MJ; Landheer D; Wade JD; Sproule GI; Denhoff MD
Journal
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, Vol. 6, No. 4, pp. 2299–2303
Publisher
American Vacuum Society
Publication Date
July 1, 1988
DOI
10.1116/1.575579
ISSN
0734-2101