Ruthenium oxide deposits prepared by cathodic electrosynthesis

Cathodic electrosynthesis of RuO2 deposits on Ni, Ti, Pt foils and Si wafers was accomplished via hydrolysis by an electrogenerated base, RuCl3 · xH2O, dissolved in water. By varying the current density and deposition time, the amount of the deposited material could be controlled. The deposits were characterized by XRD, TG/DTA and SEM. The crystallization behavior of the deposits was studied. Crystallite sizes were determined after annealing at different temperatures from X-ray broadening data.