Experimental investigation and modeling of diffusion in the InP/(In,Ga)As heterostructures

The interdiffusion of lattice-matched InP/(In,Ga)As superlattice structures (nominally undoped, p-doped and n-doped) has been studied by analytical electron microscopy (x-ray analysis) using a field emission gun, scanning transmission electron microscope. The point-spread function of the electron beam was used to correct the experimental data (obtained as x-ray maps, 50×50 nm in area) in order to derive diffusion profiles of the group V …