The Influence of the Incorporation and Desorption of Chn, Groups on the Defect Structure of a-SiC:H Films

Changes in the defect structure in carbon rich a-SiC:H films deposited on various substrates using ditertiary butyl silane were investigated as a function of thermal treatment. Films grown at high deposition rates exhibit hydrogen trapped in voids. The incorporation of CHn, groups is thought to be the origin for these microvoids. With increasing annealing temperature the effusion of CHn, groups as determined by thermal desorption experiments …