Conference
Structural and Optical Properties of Luminescent Silicon Carbonitride Thin Films
Abstract
The composition, structure, and optical characteristics of amorphous hydrogenated silicon carbonitride (a-SiCN:H) thin films were investigated as a function of nitrogen content. The electron cyclotron resonance plasma enhanced chemical vapor deposition (ECR PECVD) technique was utilized to fabricate two different types of a-SiCN:H thin films including films with varying nitrogen contents and films co-doped with cerium and terbium. The intensity …
Authors
Khatami Z; Wilson PRJ; Taggart O; Frisina DR; Wojcik J; Mascher P
Volume
61
Pagination
pp. 97-103
Publisher
The Electrochemical Society
Publication Date
March 25, 2014
DOI
10.1149/06105.0097ecst
Conference proceedings
ECS Transactions
Issue
5
ISSN
1938-5862