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Applications of defect engineering to the...
Conference

Applications of defect engineering to the fabrication of silicon-based photonic devices

Authors

Foster PJ; Doylend JK; Mascher P; Knights AP; Coleman PG

Volume

5577

Pagination

pp. 683-690

Publisher

SPIE, the international society for optics and photonics

Publication Date

December 20, 2004

DOI

10.1117/12.563330

Name of conference

Photonics North 2004: Optical Components and Devices

Conference proceedings

Proceedings of SPIE--the International Society for Optical Engineering

ISSN

0277-786X
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