Conference
Defect Characterization of InAs Wafers using Positron Lifetime Spectroscopy
Abstract
Positron lifetime measurements on InAs wafers have shown that the positron bulk lifetime in InAs is 246±2 ps. Most samples exhibit a defect lifetime of 287±6 ps, which is attributable to monovacancy-impurity complexes with a concentration of 7±2×10 16 cm-3. Very heavily doped n-type samples exhibit a defect lifetime of 332–340 ps, characteristic of divacancies. The concentration of these defects is also close to 1017 cm-3. Both types of defects …
Authors
Mahony J; Mascher P
Volume
442
Pagination
pp. 547-552
Publisher
Springer Nature
Publication Date
December 1996
DOI
10.1557/proc-442-547
Conference proceedings
MRS Advances
Issue
1
ISSN
2731-5894