Conference
Microgripper for handling and assembly in MEMS produced by SU-8 technology
Authors
Petrovic D; Popovic G; Petrovic T; Schneider A; Huq E; Detter H; Franek F
Volume
4928
Pagination
pp. 63-72
Publisher
SPIE, the international society for optics and photonics
Publication Date
September 10, 2002
DOI
10.1117/12.483150
Name of conference
MEMS/MOEMS Technologies and Applications
Conference proceedings
Proceedings of SPIE--the International Society for Optical Engineering
ISSN
0277-786X