Conference
Lateral diffusion epitaxy (LDE) of single crystal silicon with downward facing substrate
Authors
Yu LHL; Li B; Shen H; Kitai AH
Volume
8412
Publisher
SPIE, the international society for optics and photonics
Publication Date
October 23, 2012
DOI
10.1117/12.2001437
Name of conference
Photonics North 2012
Conference proceedings
Proceedings of SPIE--the International Society for Optical Engineering
ISSN
0277-786X