Journal article
Metallization stress in weakly guiding InP/InGaAsP waveguides
Abstract
Although contact metallization causes stress in the underlying material, the magnitude of the resulting change in refractive index is often not appreciated. We investigate here the distribution of the change in refractive index due to stress caused by Ti/Pt/Au contact layers in weakly guiding InGaAsP waveguides operating near 1.3 mu m. Polarization-resolved photoluminescence and beam propagation calculations, combined with a simple stress …
Authors
Daly MG; Bruce DM; Jessop PE; Cassidy DT; Yevick D
Journal
Semiconductor Science and Technology, Vol. 9, No. 7,
Publisher
IOP Publishing
Publication Date
July 1, 1994
DOI
10.1088/0268-1242/9/7/016
ISSN
0268-1242