Growth and annealing of AgInSe2 thin films

Amorphous thin films of AgInSe 2 were grown by rf magnetron sputtering and then crystallized using two forms of optical annealing: laser annealing using a raster-scanned argon laser and heat-pulse annealing using a quartz–halogen heat-lamp system. It was determined that laser annealing of films on amorphous substrates resulted in fine-grained polycrystalline chalcopyrite AgInSe 2 thin films with a preferred (112) orientation. The presence of …