Inner shell excitation of SF6 by 2.5 keV electron impact

The S 2p, S 2s and F 1s inner shell excitation spectra of SF6 have been examined by small angle, inelastic scattering of 2.5 keV electrons. While the main features of the spectra are in agreement with previous photoabsorption spectra, a number of new features have been observed. A detailed investigation of the S 2p spectrum below the ionization limit has been performed. The weak Rydberg structure in this region has been interpreted on the basis of a comparison of the present electron energy loss results with previous photoabsorption studies. Part of the Rydberg structure in the electron impact spectrum has been identified as arising from electric quadrupole transitions.