Simultaneous Multiple File EXAFS Analysis: Methodology and Application to Buried Ge–Si Interfaces

Procedures for constrained simultaneous non-linear least squares curve fits of multiple EXAFS spectra are described and their advantages discussed. The techniques are illustrated by polarisation-dependent GeK EXAFS studies of buried Ge-Si interfaces in strained layer [(Si)m(Ge)n]p/Si(100) superlattices grown by molecular beam epitaxy (MBE).