Conference
Measurement of the point spread function of a soft x-ray microscope by single pixel exposure of photoresists
Authors
Leontowich AFG; Tyliszczak T; Hitchcock AP
Volume
8077
Publisher
SPIE, the international society for optics and photonics
Publication Date
May 5, 2011
DOI
10.1117/12.887553
Name of conference
Damage to VUV, EUV, and X-ray Optics III
Conference proceedings
Proceedings of SPIE--the International Society for Optical Engineering
ISSN
0277-786X