Zone plate focused soft x-ray lithography for fabrication of nanofluidic devices Conferences

Overview
Research
Identity
Additional Document Info
View All

authors

Leontowich, Adam FG
Hitchcock, Adam Percival

status

published

publication date

March 1, 2012

published in

Proceedings of SPIE - The International Society for Optical Engineering Journal

presented at event

SPIE Advanced Lithography Conference