Boron K‐shell spectroscopy of boron‐doped silicon Conferences

authors

• Esposto, FJ
• Aebi, P
• Tyliszczak, T
• Hitchcock, Adam Percival
• Kasrai, M
• Bozek, JD
• Jackman, TE
• Rolfe, SR

status

• published 

publication date

• May 1991

has subject area

• 02 Physical Sciences (FoR)
• 09 Engineering (FoR)
• Applied Physics (Science Metrix)

published in

• Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films  Journal

keywords

• ALLOYS
• B2O3
• BOND LENGTHS
• MOLECULAR-BEAM EPITAXY
• Materials Science
• Materials Science, Coatings & Films
• Physical Sciences
• Physics
• Physics, Applied
• SHAPE RESONANCES
• SURFACE
• Science & Technology
• Technology

Digital Object Identifier (DOI)

• 10.1116/1.577482

start page

• 1663

end page

• 1669

volume

• 9

issue

• 3