Conference
Boron K ‐shell spectroscopy of boron‐doped silicon
Authors
Esposto FJ; Aebi P; Tyliszczak T; Hitchcock AP; Kasrai M; Bozek JD; Jackman TE; Rolfe SR
Volume
9
Pagination
pp. 1663-1669
Publisher
American Vacuum Society
Publication Date
January 1, 1991
DOI
10.1116/1.577482
Conference proceedings
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
Issue
3
ISSN
0734-2101