New high-performance electron energy loss spectrometer for valence and inner-shell excitation studies

A new high-resolution, differentially pumped, electron energy-loss spectrometer with the capability of measuring both valence and inner-shell spectra (at impact energies of 1–10 keV) has been constructed. Advanced electron optics have been incorporated, and the design and operation of the electron optics is discussed. Spectra of N2 are presented, demonstrating the significant improvements obtained in signal to noise and collection time in the inner-shell region compared with previous instrumentation. In addition, both valence and inner-shell spectra of HCl are presented, demonstrating the efficiency of the differential pumping, and the ability of the instrument to study highly reactive target species.