Conference
THE USE OF AN INSITU ECR HYDROGEN PLASMA TO REMOVE THE OXIDE FROM INP SUBSTRATES PRIOR TO EPITAXIAL-GROWTH
Authors
ROBINSON BJ; THOMPSON DA; HOFSTRA PG; BALCAITIS G; MCMASTER SA
Pagination
pp. 90-92
Publisher
I E E E
Publication Date
January 1, 1992
ISBN-10
0-7803-0522-1
Name of conference
4TH INTERNATIONAL CONF ON INDIUM PHOSPHIDE AND RELATED MATERIALS
Conference place
NEWPORT, RI
Conference start date
April 21, 1992
Conference end date
April 24, 1992
Conference proceedings
FOURTH INTERNATIONAL CONFERENCE ON INDIUM PHOSPHIDE AND RELATED MATERIALS