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THE USE OF AN INSITU ECR HYDROGEN PLASMA TO REMOVE THE OXIDE FROM INP SUBSTRATES PRIOR TO EPITAXIAL-GROWTH
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Overview
authors
ROBINSON, BJ
Thompson, David Allan
HOFSTRA, PG
BALCAITIS, G
MCMASTER, SA
status
published
publication date
January 1, 1992
published in
FOURTH INTERNATIONAL CONFERENCE ON INDIUM PHOSPHIDE AND RELATED MATERIALS
Journal
presented at event
4TH INTERNATIONAL CONF ON INDIUM PHOSPHIDE AND RELATED MATERIALS
Conference
Research
keywords
Materials Science
Materials Science, Multidisciplinary
Science & Technology
Technology
Identity
International Standard Book Number (ISBN) 10
0-7803-0522-1
Additional Document Info
start page
90
end page
92