Application of an in situ hydrogen plasma to the epitaxial regrowth of InP grown by molecular beam epitaxy Conference Paper

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authors

Thompson, David Allan
Hofstra, PG

status

published

publication date

May 1993

has subject area

published in

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures Journal

presented at event

12TH NORTH AMERICAN CONF ON MOLECULAR BEAM EPITAXY Conference