In-situ monitoring of electron cyclotron resonance plasma chemical vapour deposition of hydrogenated silicon nitride films
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Overview
status
publication date
- October 1993
has subject area
- 0204 Condensed Matter Physics (FoR)
- 0306 Physical Chemistry (incl. Structural) (FoR)
- 0912 Materials Engineering (FoR)
- Applied Physics (Science Metrix)
published in
- Surface and Coatings Technology Journal