Volatile products and endpoint detection in reactive ion etching of III–V compounds with a broad beam ECR source
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status
publication date
- December 1995
has subject area
- 0202 Atomic, Molecular, Nuclear, Particle and Plasma Physics (FoR)
- 0402 Geochemistry (FoR)
- 0915 Interdisciplinary Engineering (FoR)
- Applied Physics (Science Metrix)