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Molecular-beam epitaxially grown InP/InGaAsP...
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Molecular-beam epitaxially grown InP/InGaAsP heterostructure for inversion-channel devices

Abstract

A heterostructure, based on InP/InGaAsP alloys grown by gas source molecular-beam epitaxy, is presented which can be used to implement the inversion-channel family of devices. The double-heterostructure optoelectronic switch (DOES) is demonstrated for the first time in the InP/InGaAsP materials system and the current density versus voltage characteristics are presented. Numerical simulations are used to demonstrate the tolerances required in materials growth, doping, and layer thickness in order to successfully realize the heterostructure and the associated I–V characteristics of the DOES. In addition, material and interface quality are shown by simulations to affect the I–V characteristics of the InP/InGaAsP-based DOES.

Authors

Kovacic SJ; Robinson BJ; Swoger JH; Simmons JG; Thompson DA

Volume

11

Pagination

pp. 979-981

Publisher

American Vacuum Society

Publication Date

May 1, 1993

DOI

10.1116/1.586904

Conference proceedings

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

Issue

3

ISSN

2166-2746

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