Conference
Molecular-beam epitaxially grown InP/InGaAsP heterostructure for inversion-channel devices
Abstract
Authors
Kovacic SJ; Robinson BJ; Swoger JH; Simmons JG; Thompson DA
Volume
11
Pagination
pp. 979-981
Publisher
American Vacuum Society
Publication Date
May 1, 1993
DOI
10.1116/1.586904
Conference proceedings
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
Issue
3
ISSN
2166-2746