Sputtering of frozen Xenon by keV heavy ions

Sputtering measurements of frozen Xe have been made using 20–80 keV heavy ions (N, Ar, Sb and Bi), i.e. where nuclear stopping is the dominant energy loss process. Sputtering yields (Y) of up to 1.6 × 104 Xe atomsion have been obtained. The dependence of Y on the surface deposited (nuclear) energy FD(0) was found to exhibit two distinct regimes: at low FD(0) values, Yincreases linearly with deposited energy, as predicted by cascade sputtering …