Silicon photonic resonator-enhanced defect-mediated photodiode for sub-bandgap detection.

We describe, model and demonstrate a tunable micro-ring resonator integrated monolithically with a photodiode in a silicon waveguide device. The photodiode is made sensitive to wavelengths at and around 1550nm via the introduction of lattice damage through selective ion implantation. The ring resonator enhances detector responsivity in a 60 mum long waveguide photodiode such that it is 0.14 A/W at -10Vbias with less than 0.2 nA leakage current. …