Mapping of wafer profile to plasma processing conditions: Forward and reverse maps Academic Article uri icon

  •  
  • Overview
  •  
  • Research
  •  
  • Identity
  •  
  • Additional Document Info
  •  
  • View All
  •  

authors

  • Lane, Jennifer
  • Rietman, Edward A
  • Layadi, Nace
  • Lee, John

publication date

  • 2000