authors Mastro, MA Bassim, Nabil Freitas, JA Twigg, ME Eddy, CR Gaskill, DK Henry, RL Holm, RT Kim, J Neudeck, PC Trunek, AJ Powell, JA
has subject area 0904 Chemical Engineering (FoR) 0912 Materials Engineering (FoR) Materials (Science Metrix)
keywords DEFORMATION FILMS GAN GROWTH INTRINSIC STRESSES LAYER MICROSTRUCTURE Materials Science Materials Science, Ceramics PERFORMANCE RESIDUAL-STRESS SURFACES Science & Technology Technology gallium nitride growth silicon carbide strain