At-wavelength metrology of 13 nm lithography imaging optics Journal Articles uri icon

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authors

  • Tan, Z
  • MacDowell, AA
  • La Fontaine, B
  • Bjorkholm, JE
  • Tennant, D
  • Taylor, David
  • Himel, M
  • Freeman, RR
  • Waskiewicz, WK
  • Windt, DL
  • Spector, S
  • Ray-Chaudhuri, AK
  • Stulen, RH
  • Ng, W
  • Cerrina, F

publication date

  • December 1, 1995