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Chip-Package Interaction and Crackstop Study for Cu/Ultra low-k Interconnects

Authors

Zhang X; Smith RS; Huang R; Ho PS

Editors

Ho PS; Ogawa S; Zscheck E

Series

AIP Conference Proceedings

Volume

1143

Pagination

pp. 197-+

Publisher

AMER INST PHYSICS

Publication Date

January 1, 2009

ISBN-13

978-0-7354-0680-3

Name of conference

10th International Workshop on Stress-Induced Phenomena in Metallization

Conference place

TX, Univ Texas, Austin

Conference start date

November 5, 2008

Conference end date

November 7, 2008

Conference proceedings

STRESS-INDUCED PHENOMENA IN METALLIZATION

ISSN

0094-243X

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