authors Fraser, William Benedikovic, Daniel Korcek, Radovan Milanizadeh, Maziyar Xu, Dan-Xia Schmid, Jens H Cheben, Pavel Ye, Winnie N
keywords Engineering Engineering, Electrical & Electronic Optics Physical Sciences Physics Physics, Applied SILICON-NITRIDE Science & Technology Technology grating coupler silicon nitride silicon photonics subwavelength metamaterials