Conference
Silicon nitride subwavelength grating metamaterial waveguides functionalized with atomic layer deposited Al2O3 cladding
Abstract
We report on subwavelength grating metamaterial waveguides fabricated on a rapid prototyping silicon nitride foundry platform coated in aluminum oxide grown using a post-process atomic layer deposition system. We discuss the design of the metamaterial waveguides and report experimental results for the hybrid waveguide devices.
Authors
Naraine CM; Hashemi B; Hoffman NA; Price JS; Knights AP; Emslie DJH; Schmid JH; Cheben P; Bradley JDB
Volume
00
Pagination
pp. 1-1
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Publication Date
June 15, 2023
DOI
10.1109/pn58661.2023.10222993
Name of conference
2023 Photonics North (PN)