CHARACTERIZATION OF WET CHEMICAL ETCHING OF ALGAAS LAYERS USING DYNAMIC OPTICAL REFLECTIVITY Conferences

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authors

ARMSTRONG, JV
Farrell, Thomas
TURNER, G

status

published

publication date

1993

published in

CHEMICAL PERSPECTIVES OF MICROELECTRONIC MATERIALS III Journal

presented at event

3RD BIENNIAL MEETING OF CHEMICAL PERSPECTIVES OF MICROELECTRONIC MATERIALS, AT THE 1992 FALL MEETING OF THE MATERIALS RESEARCH SOC Conference