Comparison of in situ optical reflectance and post-growth characterisation for quantitative composition and thickness determination of AlxGa1-xAs
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Overview
status
publication date
- May 1999
has subject area
- 0203 Classical Physics (FoR)
- 0299 Other Physical Sciences (FoR)
- 0912 Materials Engineering (FoR)
- Applied Physics (Science Metrix)
published in
- Vacuum Journal