Internal Atomic Distortion and Crystalline Characteristics of Epitaxial SiC Thin Films Studied by Short Wavelength and Synchrotron X-ray Diffraction Chapters uri icon

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authors

  • Xu, Gu
  • Feng, Zhe Chuan
  • Yiin, Jeffrey
  • Saravade, Vishal
  • Klein, Benjamin
  • Ferguson, Ian T

publication date

  • May 31, 2023