authors
- Pelletier, N
- Beche, B
- Tahani, N
- Camberlein, L
- Gaviot, E
- Goullet, A
- Landesman, Jean-Pierre
- Zyss, J
Integrated Mach-Zehnder Interferometer on SU-8 Polymer for Designing Pressure Sensors
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publication date
- January 1, 2005
published in
- IEEE Sensors, 2005. Journal
presented at event
- IEEE Sensors, 2005. Conference