Composition profiles in InP/InAsP quantum well structures under the effect of reactives gases during dry etching processes — Luminescence and SIMS Conferences uri icon

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authors

  • Landesman, Jean-Pierre
  • Jimenez, Juan
  • Hortelano, Vanesa
  • Leger, Yoan
  • Folliot, Herve
  • Delhaye, Thomas
  • Torres, Alfredo
  • Rhallabi, Ahmed

publication date

  • May 2014