InP Surface Properties under ICP Plasma Etching using Mixtures of Chlorides and Hydrides Conferences uri icon

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authors

  • Liu, B
  • Landesman, Jean-Pierre
  • Leclercq, J-L
  • Rhallabi, A
  • Avella, M
  • Gonzalez, MA
  • Jimenez, J
  • Guilet, S
  • Cardinaud, C
  • Pommereau, F

publication date

  • January 1, 2006