A new tool for nondestructive monitoring of ion implantation Conferences

authors

• Coleman, PG
• Burrows, CP
• Knights, Andrew
• Gwilliam, RM
• Sealy, BJ
• Goldberg, RD
• Al-Bayati, A
• Foad, M
• Murrell, A

status

• accepted 

publication date

• January 1, 2000

published in

• 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432)  Journal

presented at event

• 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000  Conference

keywords

• 51 Physical Sciences
• 5106 Nuclear and Plasma Physics

Digital Object Identifier (DOI)

• 10.1109/iit.2000.924238

start page

• 654

end page

• 657