Design Considerations for a Silicon-based p-i-n Phase Modulator in a Double Ridge Waveguide with Side Isolating Grooves

We present detail design considerations and simulation results of a forward biased carrier injection p-i-n modulator integrated on SOl rib waveguides. To minimize the free carrier absorption loss while keeping the comparatively small lateral dimensions of the modulator as required for high speed operation, we proposed two structural improvements, namely the double ridge (terrace ridge) structure and the isolating grooves at both sides of the double ridge. With improved carrier injection and optical confinement structure, the simulated modulator response time is in sub-ns range and absorption loss is minimized.