Tunable index silicon nitride for CMOS photonics applications

Gardes FY; Domínguez Bucio T; Mastronardi L; De Paoli G; Jantzen SL; Skandalos I; Milosevic MM; Vitali V; Faneca J; Petropoulos P

SPIE, the international society for optics and photonics

March 5, 2021

10.1117/12.2578387

Integrated Optics: Devices, Materials, and Technologies XXV