Suspended glass nanochannels coupled with microstructures for single molecule detection

We present a nonlithographic approach for forming free standing nanochannels, made of a variety of materials, that can be easily integrated with microfabricated structures. The approach uses a deposited polymeric fiber as a sacrificial template around which a deposited coating forms a tube. We formed suspended nanochannels of silica glass spanning a trench on a silicon wafer and used these structures for detection of single fluorescently …