authors Luo, Tien-Ying Al-Shareef, Husam N Brown, George A Watt, Victor HC Karamcheti, Arun Jackson, Mike D Huff, Howard R Evans, Ben Lee, Chongmok Luan, Hong-Fa Kwong, Dim-Lee
keywords Engineering Engineering, Electrical & Electronic N-2 ion implant (N-2 I/I) Physical Sciences Physics Physics, Applied Science & Technology System-on-a-Chip (SOC) Technology vertical high pressure (VHP) re-oxidation