authors
- Vidjayacoumar, Balamurugan
- Emslie, David James Hannington
- Clendenning, Scott B
- Blackwell, James M
- Britten, James F
- Rheingold, Arnold
Investigation of AlMe3, BEt3, and ZnEt2as Co-Reagents for Low-Temperature Copper Metal ALD/Pulsed-CVD
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Overview
status
publication date
- September 14, 2010
has subject area
- 03 Chemical Sciences (FoR)
- 09 Engineering (FoR)
- Materials (Science Metrix)
published in
- Chemistry of Materials Journal