Journal article
Investigation of AlMe3, BEt3, and ZnEt2 as Co-Reagents for Low-Temperature Copper Metal ALD/Pulsed-CVD
Abstract
The reactions of AlMe3, BEt3, and ZnEt2 with toluene solutions of the copper(II) complexes [CuL2] {L = acetylacetonate (acac; 1), hexafluoroacetylacetonate (hfac; 2), N-isopropyl-β-ketiminate (acnac; 3), N,N-dimethyl-β-diketiminate (nacnac; 4), 2-pyrrolylaldehyde (PyrAld; 5), N-isopropyl-2-pyrrolylaldiminate (PyrIm iPr; 6a), N-ethyl-2-pyrrolylaldiminate (PyrImEt; 6b), and N-isopropyl-2-salicylaldiminate (IPSA; 7)} were investigated, and most …
Authors
Vidjayacoumar B; Emslie DJH; Clendenning SB; Blackwell JM; Britten JF; Rheingold A
Journal
Chemistry of Materials, Vol. 22, No. 17, pp. 4844–4853
Publisher
American Chemical Society (ACS)
Publication Date
September 14, 2010
DOI
10.1021/cm101442e
ISSN
0897-4756