Inhibition of superconductivity in YBaCuO films by aluminum ion implantation

We have studied the inhibition of superconductivity in high-temperature superconductors oxide films by aluminum ion implantation. Aluminum ions, with doses ranging from 1×1015–1×1016/cm2, were implanted into epitaxial YBa2Cu3O7−x (YBCO) films with an injection energy of 100 keV. Doses of 1×1016/cm2 completely suppressed the diamagnetism of the YBCO film without the need for annealing. Lower doses of 1×1015/cm2 inhibited the superconductivity after low-temperature annealing. The results of the aluminum implantation are compared with previous silicon and boron implantations.