Kinetics of lamellar formation on sparsely stripped patterns
- Additional Document Info
- View All
Chemical epitaxy based on the self-assembly of block copolymers is viewed as a promising technique to achieve ordered patterns on a large scale. Herein, we study the kinetics of lamellar formation of block copolymers under the direction of sparsely stripped patterns using cell dynamics simulations of the time-dependent Ginzburg-Landau theory. First, a scaling law is unveiled with the ordering time of lamellae, tp, with respect to the multiples between the periods of lamellae and stripe patterns, which is consistent with the power law evolution of the correlation length existing in the bulk phase of lamellae. Second, the tolerative windows of perfect order, with deviation from integer multiples, are also estimated from the aspect of kinetics. The results of the ordering time and tolerative windows are of great interest for relevant experiments or applications. Finally, a two-stage evolution is explored during the pattern formation of chemical epitaxy by probing into the evolution of defects, which is of fundamental interest for us to understand the coarsening kinetics of block copolymers under the direction of chemical patterns.
has subject area