Low energy Auger electron spectroscopy of titanium nitrides for quantitative analysis

The potential of the low energy (20–30 eV) region of the Auger spectrum of titanium nitrides for quantitative analysis has been examined. Nitride films were prepared by nitrogen ion implantation and adsorption at 300 and 900 K and subject to Auger electron analysis in both the low and high energy regions, The nitrogen concentration of implanted films will be uniform over the analysed depth and could be determined by spectrum simulation of the …