Periodic variations in the nitrogen KLL Auger intensity from interstitial nitride films

Abstract Transition metal nitride films have been prepared by reaction of ammonia gas at 300 Torr pressure with nine different transition metals at high temperatures in the range 900–1200°C. The films produced were typically microns thick and could therefore be characterized by x‐ray diffraction, in addition to Auger electron spectroscopy and scanning electron microscopy. Strong periodic variations in the intensity of the nitrogen KLL Auger emission have been observed from the nitrides of Ti, V, Cr, Zr, Nb, Mo, Hf, Ta and W. The measured nitrogen signal was observed to decrease within each group, and also across each period. These results are discussed with reference to matrix effects in the Auger emission and the stability and structure of the interstitial nitrides.