Quantitative surface analysis with elemental standards: Surface roughness limitations

The dependence of the detected Auger signal on crystal orientation and surface morphology has been investigated for a pure elemental standard of Mo. Two large adjacent grains with orientations close to (100) and (1, 4, 11) were used for this study. After polishing to a uniform surface topograpy the sample was sputtered with 2 keV argon ions at glancing incidence, typical of the conditions used in surface analysis. The initial line scan across …